Design and Fabrication of On-Chip Inductors

An inductor is a conductor arranged in an appropriate shape (such as a conducting wire wound as a coil) to supply a certain amount of self-inductance. This passive device stores magnetic energy. Simple spiral planar inductors of varying geometry were designed and fabricated on a silicon substrate insolated by silicon oxide. The process chosen for fabrication of the devices was the copper damascene process. Line widths and spaces varied from 5μm to 20μm. Thickness of the copper wire was approximately 1.5 μm. The inductors were isolated from the silicon substrate by 0.5 μm of Si02 and wires were insolated with the same material. Theoretical inductance values for the designed inductors ranged from 17nH to 300nH

Conference of Microelectronics Research 2001

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